Hardcover • 2008 • English

Mems & Microsystems: Design, Manufacture, and Nanoscale Engineering

Name: Mems & Microsystems: Design, Manufacture, and Nanoscale Engineering
SKU: 9780470083017
Availability: OutOfStock
ISBN: 9780470083017

By Tai-Ran Hsu

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About the book

Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to ...Show more

Book details

ISBN

9780470083017

Publisher

JOHN WILEY SONS

Published year

2008

Language

English

Original title

Mems & Microsystems: Design, Manufacture, and Nanoscale Engineering

Format

Hardcover

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